Leonard E. Klebanoff

发表

Relation between electron- and photon-caused oxidation in EUVL optics

Michael E. Malinowski, Charles A. Steinhaus, Donald E. Meeker, 2003, SPIE Advanced Lithography.

EUV engineering test stand

Kenneth A. Goldberg, Patrick P. Naulleau, Leonard E. Klebanoff, 2000, Advanced Lithography.

Investigation of plasma-induced erosion of multilayer condenser optics

Leonard E. Klebanoff, Obert Wood, Richard J. Anderson, 2005, SPIE Advanced Lithography.

PEM Fuel Cell Systems for Commercial Airplane Systems Power.

Leonard E. Klebanoff, Abbas Ali Akhil, Benjamin L. Schenkman, 2011 .

Use of molecular oxygen to reduce EUV-induced carbon contamination of optics

Michael E. Malinowski, W. Miles Clift, Leonard E. Klebanoff, 2001, SPIE Advanced Lithography.

The erosion of materials exposed to a laser-pulsed-plasma (LPP) extreme ultraviolet (EUV) illumination source

Leonard E. Klebanoff, Obert Wood, Richard J. Anderson, 2004, SPIE Advanced Lithography.

Studies of EUV contamination mitigation

Michael E. Malinowski, Leonard E. Klebanoff, Chip Steinhaus, 2002, SPIE Advanced Lithography.

System and process learning in a full-field, high-power EUVL alpha tool

Kenneth A. Goldberg, Eric M. Gullikson, Patrick P. Naulleau, 2003, SPIE Advanced Lithography.

Lifetime studies of Mo/Si and Mo/Be multilayer coatings for extreme ultraviolet lithography

Eric M. Gullikson, Michael E. Malinowski, W. Miles Clift, 1999, Optics & Photonics.

Scaling studies of capping layer oxidation by water exposure with EUV radiation and electrons

W. Miles Clift, Leonard E. Klebanoff, Obert Wood, 2004, SPIE Advanced Lithography.

Modeling carbon contamination of extreme ultraviolet (EUV) optics

Leonard E. Klebanoff, Jeromy Hollenshead, 2004, SPIE Advanced Lithography.

Final report for the DOE Metal Hydride Center of Excellence.

Leonard E. Klebanoff, Jay O. Keller, J. Keller, 2012 .

Performance upgrades in the EUV engineering test stand

Donald W. Sweeney, Kenneth A. Goldberg, Patrick P. Naulleau, 2002, SPIE Advanced Lithography.

Low-temperature fuel cell systems for commercial airplane auxiliary power.

Leonard E. Klebanoff, Abbas Ali Akhil, Dita Brigitte Curgus, 2010 .

Sandia's Fuel Cell Interests and R&D Capabilities.

Leonard E. Klebanoff, 2009 .

Current Status of the San Francisco Bay Renewable Energy Electric Vessel with Zero Emissions (SF-BREEZE) Feasibility Study.

Leonard E. Klebanoff, Joseph William Pratt, 2016 .

MHCoE Storage Tech Team Review Sandia-CA March 27 2008.

Leonard E. Klebanoff, Jay O. Keller, J. Keller, 2008 .

Verification studies of thermophoretic protection for EUV masks

Leonard E. Klebanoff, Daniel J. Rader, Daniel E. Dedrick, 2002, SPIE Advanced Lithography.

Atomic hydrogen cleaning of EUV multilayer optics

Charles A. Steinhaus, W. Miles Clift, Leonard E. Klebanoff, 2003, SPIE Advanced Lithography.

Environmental data from the engineering test stand

W. Miles Clift, Leonard E. Klebanoff, Steven J. Haney, 2002, SPIE Advanced Lithography.

Rates and mechanisms of optic contamination in the EUV engineering test stand

W. Miles Clift, Leonard E. Klebanoff, Samuel Graham, 2003, SPIE Advanced Lithography.

Initial results from the EUV engineering test stand

Pei-yang Yan, Richard H. Stulen, Donald W. Sweeney, 2001, SPIE Optics + Photonics.

Fuel cell mobile lighting: A fuel cell market transformation project

Leonard E. Klebanoff, Gerald W. Rea, R. Woolley, 2014 .

System integration and performance of the EUV engineering test stand

Pei-yang Yan, Richard H. Stulen, Donald W. Sweeney, 2001, SPIE Advanced Lithography.

First environmental data from the EUV engineering test stand

Michael E. Malinowski, W. Miles Clift, Leonard E. Klebanoff, 2001, SPIE Advanced Lithography.

Modeling extreme ultraviolet∕H2O oxidation of ruthenium optic coatings

Leonard E. Klebanoff, Jeromy Hollenshead, J. Hollenshead, 2006 .

Model Study of a Fuel Cell Range Extender for a Neighborhood Electric Vehicle (NEV).

Leonard E. Klebanoff, C. J. Radley, J. M. Oros, 2014 .

Verification studies of thermophoretic protection for extreme ultraviolet masksa)

Leonard E. Klebanoff, Daniel E. Dedrick, Eric W. Beyer, 2005 .

First lithographic results from the extreme ultraviolet Engineering Test Stand

Richard H. Stulen, Donald W. Sweeney, Kenneth A. Goldberg, 2001 .

Comparison of the safety-related physical and combustion properties of liquid hydrogen and liquid natural gas in the context of the SF-BREEZE high-speed fuel-cell ferry

Leonard E. Klebanoff, Joseph William Pratt, Chris Bensdotter LaFleur, 2017 .