Thomas Liebig

Accurate Parameter Extraction of Lossy Composite Right/Left-Handed (CRLH) Transmission Lines for Planar Antenna Applications

Daniel Erni, Andreas Rennings, Thomas Liebig, 2010 .

In-line height profiling metrology sensor for zero defect production control

Thomas Liebig, Rob Snel, Jasper Winters, 2017, Optical Metrology.

Large dynamic range Atomic Force Microscope for overlay improvements

Arie den Boef, Leon Levasier, Gert Witvoet, 2016, SPIE Advanced Lithography.