Cari F. Herrmann

Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS

Victor M. Bright, Cari F. Herrmann, Frank W. DelRio, 2005, SPIE MOEMS-MEMS.

Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength

Victor M. Bright, Cari F. Herrmann, Steven M. George, 2005, SPIE MOEMS-MEMS.

Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing

Ken Gall, David C. Miller, Hans Jürgen Maier, 2005 .

Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers

Steven M. George, Ken Gall, David C. Miller, 2007 .

A flip–chip encapsulation method for packaging of MEMS actuators using surface micromachined polysilicon caps for BioMEMS applications

Roop L. Mahajan, Cari F. Herrmann, Hrishikesh V. Panchawagh, 2007 .

The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems

Victor M. Bright, Christofer Hierold, Steven M. George, 2006 .

Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys

Victor M. Bright, Kevin D. Leedy, Steven M. George, 2007 .