Frank W. DelRio

Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS

Victor M. Bright, Cari F. Herrmann, Frank W. DelRio, 2005, SPIE MOEMS-MEMS.

Capillary adhesion model for contacting micromachined surfaces

Martin L. Dunn, Maarten P. de Boer, Frank W. DelRio, 2008 .

Orthogonal analysis of functional gold nanoparticles for biomedical applications

Frank W. DelRio, Vincent A. Hackley, Fan Zhang, 2015, Analytical and Bioanalytical Chemistry.

Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys

Victor M. Bright, Kevin D. Leedy, Steven M. George, 2007 .