Y. Kim

Combined Atomic Layer and Chemical Vapor Deposition, and Selective Growth of Ge2Sb2Te5 Films on TiN/W Contact Plug

Byung Joon Choi, Seol Choi, C. Hwang, 2007 .

Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition

Seung Wook Ryu, Cheol Seong Hwang, Byung Joon Choi, 2009 .

Cyclic PECVD of Ge2Sb2Te5 Films Using Metallorganic Sources

Cheol Seong Hwang, Yong Cheol Shin, Byung Joon Choi, 2007 .

Switching Power Reduction in Phase Change Memory Cell Using CVD Ge2Sb2Te5 and Ultrathin TiO2 Films

Byung Joon Choi, Seol Choi, C. Hwang, 2009 .