A. Kozin

Surface temperature analysis of a hot titanium target in argon magnetron sputtering system

A. Demir, V. Shapovalov, B. Korutlu, 2020, 2010.01957.

Magnetron with a sputtering unit for deposition of binary alloy films and solid solutions of two compounds

V. Shapovalov, V. Smirnov, A. Kozin, 2018, IOP Conference Series: Materials Science and Engineering.

Target heating in sputtering unit of magnetron

A A Kozin, A. Kozin, 2018, IOP Conference Series: Materials Science and Engineering.

Simulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target

A. Demir, V. Shapovalov, B. Korutlu, 2021 .

Magnetron with sandwich target for solid composite film deposition Mo x Cr1–x N

D. S. Shestakov, V. Shapovalov, A. Rudakov, 2021 .

Modeling of thermal processes in magnetrons with single hot target and “sandwich-target”

V. Shapovalov, A. Kozin, 2019, Surface and Coatings Technology.

Crystal structure and mechanical properties of titanium nitride films synthesized by magnetron sputtering with a hot target

V. Shapovalov, K. Kravchuk, V. Smirnov, 2017, Glass Physics and Chemistry.

Influence of technological parameters on the mechanical properties of titanium nitride films deposited by hot target reactive sputtering

A. A. Morozova, V. Shapovalov, К. Kravchuk, 2017 .