Stephan Merzsch

发表

Fabrication of vertical nanowire resonators for aerosol exposure assessment

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013, Microtechnologies for the New Millennium.

Analysis Methods and Strategies of Analog and Mix Signal Circuits in Power IC

Stephan Merzsch, Gan Chye Siong Kenny, Hubert Beermann, 2018, 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).

Cleaning of nanopillar templates for nanoparticle collection using PDMS

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2011, Microtechnologies.

Simulation and characterization of silicon nanopillar-based nanoparticle sensors

Hutomo Suryo Wasisto, Erwin Peiner, Kai Huang, 2013, Microtechnologies for the New Millennium.

Design and fabrication of piezoresistive p-SOI Wheatstone bridges for high-temperature applications

Erwin Peiner, Andreas Waag, Stephan Merzsch, 2011, Microtechnologies.

Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2011, Microtechnologies.

MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013, Microtechnologies for the New Millennium.

A closed-loop system for frequency tracking of piezoresistive cantilever sensors

Hutomo Suryo Wasisto, Qing Zhang, Erwin Peiner, 2013, Microtechnologies for the New Millennium.

Portable cantilever-based airborne nanoparticle detector

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2014 .

Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Erwin Peiner, Andreas Waag, Stephan Merzsch, 2010 .

Electrical performance analysis and characterization of two port piezoelectric resonators

Erwin Peiner, Dara Feili, Helmut Seidel, 2013 .

Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments

Lutz Doering, Erwin Peiner, Andreas Waag, 2012 .

Polarity and Its Influence on Growth Mechanism during MOVPE Growth of GaN Sub-micrometer Rods

Martin Strassburg, Andreas Waag, Stephan Merzsch, 2011 .

Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2012 .

Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013, Microsystem Technologies.

Femtogram aerosol nanoparticle mass sensing utilising vertical silicon nanowire resonators

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

Three-dimensionally structured silicon as a substrate for the MOVPE growth of GaN nanoLEDs

Achim Trampert, Erwin Peiner, Peter Hinze, 2009 .