J. Choi

Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave

A. Busnaina, Jinho Ahn, Jin-Goo Park, 2009 .

Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning

Ahmed Busnaina, Jinho Ahn, Jin-Goo Park, 2008 .