Jayson Stewart

Progress in availably of NXE:3400B EUVL sources in the field and power scaling towards 500W (Conference Presentation)

Igor V. Fomenkov, David C. Brandt, Jayson Stewart, 2020 .

NXE:3400B EUV source performance in the field, readiness for HVM and power scaling beyond 250W

Igor V. Fomenkov, Georgiy O. Vaschenko, Chirag Rajyaguru, 2018, Photomask Technology.

Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W

Igor V. Fomenkov, Alex I. Ershov, Chirag Rajyaguru, 2018, Advanced Lithography.