Shinya Nakajima

发表

Approach of UV nanoimprint lithography using template with gas-permeable and gaseous adsorption for reduction of air-trapping issue

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2016, Photomask Technology.

Gas permeable template derived from cellulose in ultraviolet nanoimprint

Satoshi Takei, Makoto Hanabata, Shinya Nakajima, 2018, Advanced Lithography.

Nanoimprint lithography using gas permeable template II

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2018, Advanced Lithography.

Evaluation of the properties of the permeability film material using cellulose nanofibers

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2016, Photomask Technology.

Temperature dependence of viscoelasticity of crystalline cellulose with different molecular weights added to silicone elastomer

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2017, NanoScience + Engineering.

5-kW lamp-pumped Nd:YAG lasers and their applications

Hirotaka Kanazawa, Shinya Nakajima, Minoru Uehara, 1998, Other Conferences.

High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2017, NanoScience + Engineering.

Development of Nanoimprint Lithography Template Materials using Biomass

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2016 .

Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2016 .

Characterization of Gas Permeable Template Material for Nanoimprinting

Takao Kameda, Atsushi Sekiguchi, Satoshi Takei, 2017 .