X. Li

Mass spectrometric study of gas-phase chemistry in a hot-wire chemical vapor deposition reactor with tetramethylsilane

Yujun Shi, X. Li, B. Eustergerling, 2007 .

In situ diagnostics of the decomposition of silacyclobutane on a hot filament by vacuum ultraviolet laser ionization mass spectrometry.

T. S. Sorensen, L. Tong, Y. Shi, 2007, Journal of mass spectrometry : JMS.

Effect of Si-H bond on the gas-phase chemistry of trimethylsilane in the hot wire chemical vapor deposition process.

L. Tong, Y. Shi, X. Li, 2011, The journal of physical chemistry. A.

Pulse electroplating of copper film: a study of process and microstructure.

Zhong Chen, C. C. Wong, K. Tu, 2008, Journal of nanoscience and nanotechnology.

Silicidation and carburization of the tungsten filament in HWCVD with silacyclobutane precursor gases

Yujun Shi, L. Tong, X. Li, 2011 .

Mass spectrometric study of gas-phase chemistry in the hot-wire CVD processes of SiH4/NH3 mixtures

Yujun Shi, X. Li, B. Eustergerling, 2008 .