M. Künle

发表

Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealing

K. Nickel, S. Janz, O. Eibl, 2010 .

Changes in chemical composition and nanostructure of SiC thin films prepared by PECVD during thermal annealing

K. Nickel, S. Janz, O. Eibl, 2011 .

Low temperature silicon dioxide by thermal atomic layer deposition: Investigation of material properties

Andre Stesmans, Daniel Hiller, Margit Zacharias, 2010 .

Analysis of Microstructural Transformations During Annealing of a-SixC1-x:H/a-SiC:H Layer Stacks for the Preparation of Silicon Quantum Dot Superlattices

S. Janz, A. Hartel, M. Künle, 2008 .

Annealing of nm-thin Si1−xCx/SiC multilayers

K. Nickel, S. Janz, O. Eibl, 2013 .

Rear-Side Contact Structure for Epitaxy Wrap-Through Silicon Thin-Film Solar Cells

S. Reber, S. Janz, M. Kwiatkowska, 2008 .

SiC Epitaxial Growth in a 7x100mm/3x150mm Horizontal Hot-Wall Batch Reactor

T. Höchbauer, M. Leitner, M. Künle, 2015 .