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A. Khelloufi
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SIMS and auger investigation of thin a-SiC and a-SiC:H films by Up-Down sputtering DC magnetron, impact on optical properties
Y. Belkacem, A. Keffous, A. Cheriet, 2014, 2014 North African Workshop on Dielectic Materials for Photovoltaic Systems (NAWDMPV).