A. Eitoku

All Wet Photoresist Strip by Solvent Aerosol Spray

R. Vos, P. Mertens, K. Sano, 2009 .

Removal of Small (<100-nm) Particles and Metal Contamination in Single-Wafer Cleaning Tool

Kazuo Nakajima, Marc Heyns, Rita Vos, 2003 .

Removal of Nano-Particles by Mixed-Fluid Jet: Evaluation of Cleaning Performance and Comparison with Megasonic

K. Wostyn, W. Fyen, P. Mertens, 2007 .

Aging Phenomena in the Removal of Nano-Particles from Si Wafers

C. Vinckier, P. Mertens, G. Vereecke, 2007 .