C. A. Lee

Ultrahigh Vacuum Rapid Thermal Chemical Vapor Deposition of Epitaxial Silicon onto (100) Silicon I . The Influence of Prebake on (Epitaxy/Substrate) Interfacial Oxygen and Carbon Levels

K. Violette, I. Ban, M. C. Öztürk, 1995 .

Sims determinations of ion-implanted depth distributions

G. Harris, G. Morrison, D. P. Leta, 1980 .

On the origin of periodic surface structure of laser‐annealed semiconductors

G. Maracas, G. Harris, C. A. Lee, 1978 .