A. Kazor

发表

Space‐charge oxidant diffusion model for rapid thermal oxidation of silicon

A. Kazor, 1995 .

LOW-TEMPERATURE PHOTO-ASSISTED OXIDATION OF SILICON

I. Boyd, A. Kazor, 1992 .

GROWTH-RATE ENHANCEMENT USING OZONE DURING RAPID THERMAL-OXIDATION OF SILICON

I. Boyd, R. Gwilliam, A. Kazor, 1994 .

OZONE-INDUCED RAPID LOW-TEMPERATURE OXIDATION OF SILICON

I. Boyd, A. Kazor, 1993 .

Fluorine enhanced oxidation of silicon at low temperatures

Ian W. Boyd, Chris Jeynes, C. Jeynes, 1994 .

Ozone oxidation of silicon

I. Boyd, A. Kazor, 1993 .

Growth and modeling of cw‐UV induced oxidation of silicon

I. Boyd, A. Kazor, 1994 .