Y. Komura

Preparation of nanocrystalline cubic silicon carbide thin films by hot-wire CVD at various filament-to-substrate distances

A. Tabata, Y. Komura, 2007 .

Influence of gas pressure on low-temperature preparation and film properties of nanocrystalline 3C-SiC thin films by HW-CVD using SiH4/CH4/H2 system

Tomoki Narita, A. Tabata, A. Kondo, 2008 .

Properties of Nanocrystalline Cubic Silicon Carbide Thin Films Prepared by Hot-Wire Chemical Vapor Deposition Using SiH4/CH4/H2 at Various Substrate Temperatures

Tomoki Narita, A. Tabata, A. Kondo, 2008 .

Nanocrystalline cubic silicon carbide films prepared by hot-wire chemical vapor deposition using SiH4/CH4/H2 at a low substrate temperature

T. Mizutani, Tomoki Narita, A. Tabata, 2006 .

Film Properties of Nanocrystalline 3C–SiC Thin Films Deposited on Glass Substrates by Hot-Wire Chemical Vapor Deposition Using CH4 as a Carbon Source

T. Mizutani, A. Tabata, A. Kondo, 2007 .

Preparation of Nanocrystalline Silicon Carbide Thin Films by Hot-Wire Chemical Vapor Deposition at Various Filament Temperature

A. Tabata, Y. Komura, M. Kanaya, 2006, 2006 IEEE 4th World Conference on Photovoltaic Energy Conference.