Kyung-Bo Ko

Analytical study of polymer deposition distribution for two-dimensional trench sidewall in low-k fluorocarbon plasma etching process

Gwang-Sik Kim, S. Kim, Hyun‐Yong Yu, 2018 .

Gate-first high-k/metal gate DRAM technology for low power and high performance products

Sung-Joo Hong, Heung-Jae Cho, N. Kwak, 2015, 2015 IEEE International Electron Devices Meeting (IEDM).