M. Kannan

Studies on the low dielectric SiOC(-H) thin films deposited using MTMS and oxygen as precursors by UV source assisted PECVD

C. Choi, C. Yang, M. Kannan, 2005 .

Aging, Annealing, and Dielectric Properties of Neodymium Oxide Thin Films

C. Balasubramanian, D. Mangalaraj, M. Kannan, 1990 .

Structure and Electrical Properties of Thermally Evaporated Nd2O3 Thin Films

C. Balasubramanian, D. Mangalaraj, M. Kannan, 1991 .