D. Mataras

Comparative study of plasma-deposited fluorocarbon coatings on different substrates

E. Farsari, D. Rapakoulias, E. Amanatides, 2011 .

Simulation of the Electrical Properties of SiH4/H2 RF Discharges

E. Amanatides, B. Lyka, D. Mataras, 2006 .

Modeling and experiments of high-pressure VHF SiH4/H2 discharges for higher microcrystalline silicon deposition rate ☆

Xiaodang Zhang, Ying Zhao, E. Amanatides, 2008 .

Relative importance of hydrogen atom flux and ion bombardment to the growth of μc-Si:H thin films

E. Amanatides, B. Lyka, D. Mataras, 2006 .