Y.H.C. Cha

Effects of activated reactive evaporation process parameters on the microhardness of polycrystalline silicon carbide thin films

R. Bunshah, H. J. Doerr, Y.H.C. Cha, 1994 .

Substrate bias effect of the activated reactive evaporation processed β-SiC thin films

R. Bunshah, H. J. Doerr, P. Kim, 1997 .

Electrical properties of polycrystalline β-SiC thin films for high temperature sensors grown by the activated reactive evaporation process

R. Bunshah, H. J. Doerr, Y.H.C. Cha, 1993 .

Synthesis of β-SiC thin films for high temperature sensors by the activated reactive evaporation process

S. Prakash, R. Bunshah, S. Jou, 1993 .

Electrical resistance drift of molybdenum silicide thin film temperature sensors

Rointan F. Bunshah, S. Prakash, C. Ho, 1995 .