Sanni Seppälä

Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O3for atomic layer deposition of ZrO2

M. Ritala, M. Leskelä, K. Mizohata, 2019, Journal of Vacuum Science & Technology A.

Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

M. Ritala, M. Leskelä, M. Kemell, 2017 .

Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

M. Ritala, M. Leskelä, K. Mizohata, 2018, Thin Solid Films.

Heteroleptic Cyclopentadienyl-Amidinate Precursors for Atomic Layer Deposition (ALD) of Y, Pr, Gd, and Dy Oxide Thin Films

M. Ritala, M. Leskelä, K. Mizohata, 2016 .