Yuzhang Liu

Diffusion barrier performance of W/Ta-W-N double layers for Cu metallization

Huiqin Ling, Ming Li, D. Mao, 2006 .

Diffusion barrier performance of reactively sputtered Ta-W-N between Cu and Si

Huiqin Ling, Ming Li, D. Mao, 2004 .

Diffusion barrier performances of thin Mo, Mo-N and Mo/Mo-N films between Cu and Si

Huiqin Ling, Ming Li, D. Mao, 2005 .