V. Layes

Deposition of SiOx coatings by inductively coupled plasma: Effect of pulsed hexamethyldisiloxan flow

J. Benedikt, M. Böke, M. Brochhagen, 2018 .

Current–voltage characteristics and fast imaging of HPPMS plasmas: transition from self-organized to homogeneous plasma regimes

Y. A. Gonzalvo, A. Hecimovic, T. Arcos, 2013 .

Vacuum ultraviolet spectroscopy of cold atmospheric pressure plasma jets

J. Benedikt, Vincent Layes, B. Biskup, 2020 .

Summarizing results on the performance of a selective set of atmospheric plasma jets for separation of photons and reactive particles

J. Lackmann, J. Bandow, J. Benedikt, 2015 .

Species transport on the target during high power impulse magnetron sputtering

J. Trieschmann, A. Keudell, T. Arcos, 2017 .

Connection between target poisoning and current waveforms in reactive high-power impulse magnetron sputtering of chromium

A. von Keudell, C. Corbella, V. Schulz-von der Gathen, 2018, Plasma Sources Science and Technology.

Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics

A. Keudell, T. Arcos, V. S. Gathen, 2017 .

High power impulse sputtering of chromium: correlation between the energy distribution of chromium ions and spoke formation

J. Benedikt, C. Maszl, A. Hecimovic, 2015 .