D. Fernández

发表

Study of the gas-phase parameters affecting the silicon-oxide film deposition induced by an ArF laser

J. Pou, M. Pérez-Amor, P. González, 1993 .

The role of the buffer gas in the ArF laser chemical vapour deposition of silicon oxide

J. Pou, M. Pérez-Amor, P. González, 1993 .

The effect of coating density on the strain tolerance of corrosion resistant amorphous silica

J. Pou, M. Pérez-Amor, P. González, 1993 .

Excimer laser CVD of silicon oxide on GaAs: a comparison with deposition on c-Si

J. Pou, M. Pérez-Amor, P. González, 1992 .

High-temperature corrosion-resistant ceramic coatings obtained by laser chemical vapour deposition

J. Pou, M. Pérez-Amor, P. González, 1994 .

Ceramic coating for high-temperature corrosion protection by laser-CVD processes

J. Pou, M. Pérez-Amor, P. González, 1994 .

Evaluation of high temperature sulphidation protection provided by amorphous Si/SiO2 coatings produced by ArF excimer laser chemical vapour deposition

J. Pou, M. Pérez-Amor, P. González, 1994 .

HIGH TEMPERATURE CORROSION PERFORMANCE OF a-Si/SiO2 DUPLEX COATINGS PRODUCED BY ArF EXCIMER LASER CVD

J. Pou, M. Pérez-Amor, P. González, 1994 .

Aging of photochemical vapor deposited silicon oxide thin films

Mariano Perez-Amor, Juan Pou, Julia Serra, 1996 .

Tailoring silicon oxide film properties by tuning the laser beam-to-substrate distance in ArF laser-induced chemical vapor deposition

J. Pou, M. Pérez-Amor, P. González, 1994 .

Photo-induced chemical vapour deposition of silicon oxide thin films

J. Pou, M. Pérez-Amor, P. González, 1992 .

Geometrical factors affecting the CO2 laser chemical vapour deposition of silicon oxide films in parallel configuration

J. Pou, M. Pérez-Amor, P. González, 1992 .

Silicon oxide thin films grown by Xe2* excimer lamp chemical vapour deposition : the role of the substrate temperature and the window-substrate distance

J. Pou, M. Pérez-Amor, P. González, 1994 .