Christian Preischl

SiO2 etching and surface evolution using combined exposure to CF4/O2 remote plasma and electron beam

D. Rhinow, G. Oehrlein, K. Edinger, 2022, Journal of Vacuum Science & Technology A.

Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma

D. Rhinow, G. Oehrlein, K. Edinger, 2023, Journal of Vacuum Science & Technology A.

Surface-Anchored Metal-Organic Frameworks as Versatile Resists for Gas-Assisted E-Beam Lithography: Fabrication of Sub-10 Nanometer Structures.

C. Wöll, H. Gliemann, Luisa Berger, 2018, ACS nano.

Electron Beam-Induced Surface Activation of Metal–Organic Framework HKUST-1: Unraveling the Underlying Chemistry

P. Swiderek, H. Marbach, Christian Preischl, 2018, The Journal of Physical Chemistry C.

Nanoscale Ruthenium-Containing Deposits from Ru(CO)4I2 via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond

H. Steinrück, L. McElwee‐White, H. Marbach, 2022, ACS Applied Nano Materials.

Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing

A. Gölzhäuser, H. Marbach, Linh Hoang Le, 2021, Beilstein journal of nanotechnology.