Cheol-Min Choi
发表
Optical, mechanical and etch properties of amorphous carbon nitride films grown by plasma enhanced c
S. Kim,
Y. Hahn,
K. Lee,
2010
.
Soumen Das,
Dae-Young Kim,
Y. Hahn,
2011
.
Soumen Das,
Dae-Young Kim,
Y. Hahn,
2011
.