Isahiro Hasegawa

Mechanism of Oxidation of Si Surfaces Exposed to O2/Ar Microwave-Excited Plasma

T. Yamauchi, H. Sugai, Isahiro Hasegawa, 2007 .

Measurements and Simulations of Particles in a Plasma Chemical Vapor Deposition Chamber

S. Takagi, S. Onoue, Kazuhito Nishitani, 2003 .

Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma

T. Yamauchi, H. Sugai, Isahiro Hasegawa, 2006 .