Y. Yang

Controllable nitrogen incorporation in HfO2 films by modulating capacitively-combined inductively-coupled plasmas

X. M. Wu, L. Zhuge, C. Jin, 2013 .

Structure, optical properties and thermal stability of HfErO films deposited by simultaneous RF and VHF magnetron sputtering

X. M. Wu, Y. Wang, L. Zhuge, 2015 .

Development of a compact 325 MHz proton interdigital H -mode drift tube linac with high shunt impedance

P. Ma, C. Du, R. Tang, 2021 .

THE 230 MeV PROTON ACCELERATOR FOR XI ’ AN PROTON APPLICATION FACILITY

Tang, H. Zhang, H. Zhang, 2016 .

Structural and electrical properties of high-k HfO2 films modified by CHF3 and C4F8/O2 plasmas

L. Zhuge, C. Jin, C. Ye, 2014 .