M. Locy

On line diagnostics and support as a key part of process module control

M. Locy, 2000, Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130).

The impact of e-diagnostics - one year later

M. Locy, 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).