T. Koganesawa

Effect of Polymer Protection and Film Thickness on Acid Generator Distribution in Chemically Amplified Resists

Hiroki Yamamoto, S. Tagawa, T. Kozawa, 2009 .

Evaluation of super-critical thickness strained-Si on insulator (sc-SSOI) substrate

A. Ogura, T. Shimura, D. Kosemura, 2008 .

X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists

S. Tagawa, S. Tagawa, T. Kozawa, 2007, 2007 Digest of papers Microprocesses and Nanotechnology.

Effect of Molecular Structure on Depth Profile of Acid Generator Distribution in Chemically Amplified Resist Films

S. Tagawa, T. Kozawa, K. Horie, 2009 .