C. Tsai

Rapid thermal process driven intra-die device variations

L. Pelaz, M. Aboy, P. Timans, 2022, Materials Science in Semiconductor Processing.

Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit

Chih-Kung Lee, L. Pelaz, I. Santos, 2022, Applied Physics Letters.