林揆训

Spatial distribution of SiCln （n=O-2） in SICl4 plasma measured by mass spectroscopy

王照奎, 林揆训, 娄艳辉, 2006 .

A new method of measuring the spatial distribution of depletion fraction of silane plasma by mass spectrometer

王照奎, 林揆训, 林璇英, 2005 .

Spatial distribution of electron characteristic in argon rf glow discharges

林揆训, 林璇英, 祝祖送, 2006 .