Youn-Jin Oh

A NEW CHEMICAL MECHANICAL POLISHING METHOD USING THE FROZEN ETCHANT PAD

Youn-Jin Oh, Gyung-Soon Park, Sung Yong Park, 2001 .

The Topographical Selectivity in Pd-Activated Electroless Copper Deposition

Youn-Jin Oh, Chan-Hwa Chung, Sung Min Cho, 2001 .

Planarization of Copper Layer for Damascene Interconnection by Electrochemical Polishing in Alkali-Based Solution

Youn-Jin Oh, Gyung-Soon Park, Chan-Hwa Chung, 2006 .