Shinji Suganomata Shinji Suganomata

Optical Properties of LiNbO3 Implanted with Ag+ Ions

Shang Deying, Yukinori Saito Yukinori Saito, Shinji Suganomata Shinji Suganomata, 1994 .

Negative Ions in 13.56 MHz Discharge of SF6 Gas in a Planar Diode

E. Nishimura, Yukinori Saito, I. Ishikawa, 1995 .

Mass spectrometry of discharge products at 13.56 MHz in SF6 gas

Hidehiko Kobayashi, Eiichi Nishimura, Itsuo Ishikawa, 1994 .

Electron Temperature in RF Discharge Plasma of CF4/N2 Mixture

Hidehiko Kobayashi, Shinji Suganomata Shinji Suganomata, Itsuo Ishikawa Itsuo Ishikawa, 1994 .

Mass Spectrometric Observation of Decomposition Products SFx (x=1, 2) in SF6 Discharge at 13.56 MHz

E. Nishimura, I. Ishikawa, Yukinori Saito Yukinori Saito, 1993 .