Chao Cheng

A Low-Temperature-Sensitivity Resonant Pressure Microsensor Based on Eutectic Bonding

Junbo Wang, Deyong Chen, Jian Chen, 2022, IEEE Sensors Journal.

A High-Sensitivity Resonant Differential Pressure Microsensor Based on Bulk Micromachining

Junbo Wang, Deyong Chen, Jian Chen, 2021, IEEE Sensors Journal.

A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

Junbo Wang, Deyong Chen, Jian Chen, 2021, Micromachines.