A. Amusan

Ag films grown by remote plasma enhanced atomic layer deposition on different substrates

C. Pinnow, K. Wandel, E. Burte, 2016 .

Spin-hall-active platinum thin films grown via atomic layer deposition

A. Thomas, K. Nielsch, J. Bachmann, 2018, Applied Physics Letters.

Investigation of oxide thin films deposited by atomic layer deposition as dopant source for ultra-shallow doping of silicon

E. Burte, M. Lisker, B. Kalkofen, 2013 .

Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon

E. Burte, M. Lisker, B. Garke, 2015 .