M. Nozoe

An energy analyzer for high-speed secondary electrons accelerated in inspection SEM imaging

H. Shinada, M. Matsui, H. Nishiyama, 2002 .

Interval Scan Inspection Technique for Contact Failure of Advanced DRAM Process using Electron Beam-Inspection System

Mari Nozoe, D. Y. Mun, J. H. Oh, 2012 .

Quantitative scanning electron microscope measurement of resistance of incomplete contact holes in ultralarge scale integrated devices

Mari Nozoe, Hidetoshi Nishiyama, H. Nishiyama, 2005 .

Detecting Defects in Cu Metallization Structures by Electron-Beam Wafer Inspection

Mari Nozoe, Miyako Matsui, Cheng Zhaohui, 2004 .

Development of Particle Detection System using Subtracted Image Signal.

Masami Ikota, Nobuyuki Akiyama, Masayoshi Serizawa, 1991 .