Angela Duparré

发表

Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components

Sven Schröder, Hein Uhlig, Angela Duparré, 2005, SPIE Optical Systems Design.

Optical performance of LPP multilayer collector mirrors

Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2012, Advanced Lithography.

Makyoh-Imaging zur Charakterisierung reflektierender OberflächenSurface Structure Analysis by Makyoh-Imaging

Angela Duparré, Alexander von Finck, Michael Pfeffer, 2009 .

Scattering of EUV optics: substrate, coating, and degradation effects

Andreas Tünnermann, Torsten Feigl, Angela Duparré, 2008, SPIE Advanced Lithography.

Determining parametric TIS behavior from optical fabrication metrology data

Angela Duparré, James E. Harvey, Narak Choi, 2011, Optical Engineering + Applications.

Scanning force microscopy for optical surface metrology

Angela Duparré, Marcel Flemming, K. Roder, 2005, SPIE Optical Systems Design.

Roughness characterization of large EUV mirror optics by laser light scattering

Torsten Feigl, Sven Schröder, Angela Duparré, 2011, Optical Systems Design.

Bewertung von Nanorauheiten durch Streulichtmessung (Nano-roughness Assessment by Light Scattering Measurement)

Andreas Tünnermann, Angela Duparré, Sven Schröder, 2006 .

Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany

Angela Duparré, Roland Geyl, Lingli Wang, 2005 .

Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA

Angela Duparré, Bhanwar Singh, Ghanim A. Al-Jumaily, 2000 .

Wavelet-Filterung von fraktalen Oberflächen (Wavelet Filtering of Fractal Surfaces)

Angela Duparré, Andreas Tünnermann, Rolf Krüger-Sehm, 2008 .

Entwicklung einer Kalibrierrichtlinie für Rastersondenmikroskope (Development of a Calibration Guideline for Scanning Probe Microscopes)

Angela Duparré, Ludger Koenders, Marcel Flemming, 2005 .

Advanced characterization techniques for optical, semiconductor, and data storage components : 9-11 July 2002 Seattle, Washington, USA

Angela Duparré, Bhanwar Singh, 2002 .

Efficient specification and characterization of surface roughness for extreme ultraviolet optics

Torsten Feigl, Angela Duparré, Marcus Trost, 2011, Advanced Lithography.

Light scattering to detect imperfections relevant for laser-induced damage

Sven Schröder, Angela Duparré, Marcus Trost, 2012, Laser Damage.

Vane-free design for star trackers and telescopes

Angela Duparré, A. von Finck, A. Yevtushenko, 2017, International Conference on Space Optics.

Impact of surface roughness on the scatter losses and the scattering distribution of surfaces and thin film coatings

Sven Schröder, Angela Duparré, James E. Harvey, 2011, Optical Systems Design.

Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials

Sven Schröder, Angela Duparré, Marcus Trost, 2013, Pacific Rim Laser Damage.

Fusion multimodaler Daten am Beispiel eines Mikrolinsen-Arrays (Multimodal Data Fusion Exemplified on a Microlens Array)

Wolfgang Osten, Johan Regin, Wolfram Lyda, 2008 .

Light scattering characterization of optical components: BRDF, BTDF, and scatter losses

Sven Schröder, Angela Duparré, Uwe D. Zeitner, 2014, Photonics Asia.

2015 SYSTEMS DESIGN

Michel Lequime, Angela Duparré, Roland Geyl, 2015 .

In situ and ex situ characterization of optical surfaces by light scattering techniques

Angela Duparré, Stefan Risse, Andreas Tünnermann, 2014 .

Scattering analysis of optical components in the DUV

Angela Duparré, Stefan Gliech, Sven Schröder, 2006, SPIE LASE.

Sophisticated light scattering techniques from the VUV to the IR regions

Sven Schröder, Angela Duparré, Marcus Trost, 2012, Other Conferences.

Angle and wavelength resolved light scattering measurement of optical surfaces and thin films

John C. Stover, Sven Schröder, Angela Duparré, 2013, Optics & Photonics - Optical Engineering + Applications.

Angle resolved scattering: a method for in situ investigations of laser-induced damage?

Sven Schröder, Angela Duparré, Tobias Herffurth, 2009, Laser Damage.

OIC 2016 Measurement Problem

Angela Duparré, Marcus Trost, 2016 .

Characterization of thin films and bulk materials for DUV optical components

Sven Schröder, Angela Duparré, Mathias Kamprath, 2006, SPIE Laser Damage.

Sensitive and flexible light scatter techniques from the VUV to IR regions

Sven Schröder, Angela Duparré, Stefan Gliech, 2005, SPIE Optical Systems Design.

Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA

Angela Duparré, Zu-Han Gu, Bhanwar Singh, 2003 .

Estimating hemispherical scatter from incident plane measurements of isotropic samples

John C. Stover, Sven Schröder, Angela Duparré, 2012, Other Conferences.

Finish assessment of complex surfaces by advanced light scattering techniques

Sven Schröder, Angela Duparré, 2008, Optical Systems Design.

Estimating hemispherical scatter from incident plane measurements of isotropic samples scattering from both bulk and surface irregularities

John C. Stover, Angela Duparré, Sven Schroeder, 2013, Optics & Photonics - Optical Engineering + Applications.

Roughness, optical, and wetting properties of nanostructured thin films

Angela Duparré, Sven Schröder, Luisa Coriand, 2013, Optics & Photonics - NanoScience + Engineering.

Light scattering from the volume of optical thin films: theory and experiment.

Angela Duparré, Karl Hehl, Samer Kassam, 1992, Applied optics.

Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers.

Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2011, Applied optics.

Light Scattering of Optical Components for Space Applications

Sven Schröder, Angela Duparré, Uwe D. Zeitner, 2014 .

Photothermal absorption microscopy of defects in ZrO2 and MgF2 single-layer films

Angela Duparré, Eberhard Welsch, Michael Reichling, 1994 .

Scattering of Roughened TCO Films – Modeling and Measurement

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2010 .

Angela Duparré, Norbert Kaiser, Eberhard Welsch, 1990 .

Evaluation of subsurface damage by light scattering techniques.

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2013, Applied optics.

Roughness evolution and scatter losses of multilayers for 193 nm optics.

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2008, Applied optics.

Assessment Criteria for Superhydrophobic Surfaces with Stochastic Roughness

Angela Duparré, Luisa Coriand, 2013 .

Light scattering of interference coatings from the IR to the EUV spectral regions

Sven Schröder, Angela Duparré, Marcus Trost, 2013 .

EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates.

Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2007, Optics express.

Impact of surface roughness on spectral properties of thin films and multilayers

Alexander V. Tikhonravov, Michael K. Trubetskov, Angela Duparré, 2001 .

Design and characterization of nanostructured ultrahydrophobic coatings.

Angela Duparré, Marcel Flemming, 2006, Applied optics.

Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2007 .

Surface characterization of optical components for the DUV, VUV and EUV

Angela Duparré, Igor V. Kozhevnikov, Stefan Gliech, 2001 .

Origins of light scattering from thin film coatings

Sven Schröder, Angela Duparré, Marcus Trost, 2015 .

Relation between light scattering and the microstructure of optical thin films.

Angela Duparré, Samer Kassam, 1993, Applied optics.

Spectral Angle Resolved Scattering of Thin Film Coatings

Sven Schröder, Angela Duparré, Marcus Trost, 2013 .

Characterization of optical coatings using a multisource table-top scatterometer.

Stefan Sinzinger, Sven Schröder, Angela Duparré, 2014, Applied optics.

Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis.

Sven Schröder, Angela Duparré, Marcus Trost, 2010, Applied optics.

Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III

Angela Duparré, Zu-Han Gu, Bhanwar Singh, 2003 .

Scattering reduction through oblique multilayer deposition.

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2014, Applied optics.

Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications.

Angela Duparré, Marcel Flemming, Jörg Steinert, 2002, Applied optics.

Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor.

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2013, Applied optics.

Scatter Reduction of Calcium Fluoride Based DUV Optics

Sven Schröder, Angela Duparré, Marcus Trost, 2016 .

Generic detrending of surface profiles

Angela Duparré, Hendrik Rothe, A. Duparré, 1994 .

Determination of the Wenzel roughness parameter by the Power Spectral Density of functional Alumina surfaces

Sven Schröder, Angela Duparré, Flavio Horowitz, 2016 .

Atomic force microscopy on cross-sections of optical coatings: a new method

Angela Duparré, Péter B. Barna, C. Ruppe, 1995 .

Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films.

Angela Duparré, Detlev Ristau, Etienne Quesnel, 2002, Applied optics.

Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry

Alexander V. Tikhonravov, Michael K. Trubetskov, Angela Duparré, 2001 .

Laser damage studies on MgF2 thin films

Angela Piegari, Angela Duparré, Detlev Ristau, 2001 .

Optical Fabrication, Testing, and Metrology III

Angela Duparré, Roland Geyl, 2004 .

Ultra-hydrophobicity Through Stochastic Surface Roughness

Angela Duparré, Marcel Flemming, Luisa Coriand, 2009 .

Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation.

Angela Duparré, Detlev Ristau, Etienne Quesnel, 2002, Applied optics.

Spectral angle resolved scattering of thin film coatings.

Sven Schröder, Angela Duparré, Marcus Trost, 2014, Applied optics.

Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources.

Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2013, Optics express.

Characterization of Surface and Thin-Film Roughness Using PSD Functions

Angela Duparré, 2008 .

Bulk scattering properties of synthetic fused silica at 193 nm.

Andreas Tünnermann, Sven Schröder, Angela Duparré, 2006, Optics express.

Standardization of light scattering measurements

Sven Schröder, Angela Duparré, Alexander von Finck, 2015 .

Effect of Film Thickness and Interface Roughness Correlation on the Light Scattering from Amorphous and from Columnar Structured Optical Films

Angela Duparré, A. Duparré, 1991 .

Effects of interface roughness on the spectral properties of thin films and multilayers.

Angela Duparré, Michael K Trubetskov, A. Duparré, 2003, Applied optics.

Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions.

Sven Schröder, Angela Duparré, Stefan Gliech, 2005, Applied optics.