S. Nagaoka

Enhancement of Photoresist Removal Rate by Using Atomic Hydrogen Generated under Low-pressure Conditions

Masashi Yamamoto, H. Horibe, K. Ohdaira, 2015 .

Oxygen additive effects on decomposition rate of poly(vinyl phenol)-based polymers using hydrogen radicals produced by a tungsten hot-wire catalyst

Masashi Yamamoto, H. Horibe, K. Ohdaira, 2019, Thin Solid Films.

Microstructure and Superconductivity in Epitaxial MgO/NbN Multilayers

K. Hamasaki, T. Yamashita, T. Komata, 1989 .

All‐NbN nanobridges for DC‐SQUID application produced by field emission

K. Hamasaki, A. Irie, T. Yamashita, 1989 .

Photoresist Removal Using H Radicals Generated by Iridium Hot-Wire Catalyst

Masashi Yamamoto, H. Horibe, K. Ohdaira, 2017 .

Process variation monitoring (PVM) by wafer inspection tool as a complementary method to CD-SEM for mapping LER and defect density on production wafers

Doron Meshulach, Shimon Levi, Kobi Kan, 2009, Advanced Lithography.

Photoresist removal using hydrogen radicals produced by tantalum hot-wire catalyst

Masashi Yamamoto, H. Horibe, T. Shikama, 2019, NANOSCIENCE AND NANOTECHNOLOGY: NANO-SciTech.