Kentaro Sugawara

发表

Pixel length calibration using a pattern matching method for secondary-electron images

Ichiko Misumi, Satoshi Gonda, Kentaro Sugawara, 2013, Other Conferences.

Extension of gravity center method for diameter calibration of polystyrene standard particles with a metrological AFM

Ichiko Misumi, Satoshi Gonda, Kentaro Sugawara, 2012, Defense + Commercial Sensing.

Development of photomask linewidth measurement and calibration using AFM and SEM in NMIJ

Ichiko Misumi, Satoshi Gonda, Osamu Sato, 2011, Defense + Commercial Sensing.

LINING SHAPE MEASUREMENT OF TUNNEL CONSTRUCTED BY TIMBERING SUPPORT METHOD

Yujing Jiang, Tsuyoshi Domon, Kentaro Sugawara, 2016 .

Recent activity of international comparison for nanoparticle size measurement

Ichiko Misumi, Satoshi Gonda, Kentaro Sugawara, 2014, Other Conferences.

Nanometric lateral scale development with Si/SiO2 multilayer thin-film structures and improvement of uncertainty evaluation using analysis of variance

Ichiko Misumi, Satoshi Gonda, Hideyuki Tanaka, 2008 .

Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2006 .

Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2010 .

Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes

Osamu Sato, Ichiko Misumi, Satoshi Gonda, 2008 .

Extension of the range of profile surface roughness measurements using metrological atomic force microscope

Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, 2019, Precision Engineering.

Application of a GaAs/InGaP superlattice in nanometric lateral scales

Osamu Sato, Toshiyuki Takatsuji, Ichiko Misumi, 2007 .