H. Fukui

Improvement Of Pecvd-SiNx For Tft Gate Insulator By Controlling Ion Bomberdment Energy

T. Ohmi, K. Fukuda, S. Ono, 1995 .

Minimizing damage and contamination in RIE processes by extracted-plasma-parameter analysis

Tadahiro Ohmi, T. Yamashita, T. Ohmi, 1992 .