Sang Mo Moon

Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition

Sang Woon Lee, Ju Young Sung, Hanjin Lim, 2022, Advanced Materials Technologies.

Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review

Yewon Yun, Se Eun Kim, Sang Mo Moon, 2024, Current Applied Physics.