Yanjun Lu

An effective scheduling method to single-arm cluster tools for processing multiple wafer types

N. Wu, Zhiwu Li, Yan Qiao, 2022, Journal of Industrial and Management Optimization.

Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net

Naiqi Wu, Yufeng Chen, Yan Qiao, 2021, IEEE Access.

An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements

N. Wu, Yan Qiao, Yanjun Lu, 2022, IEEE Transactions on Automation Science and Engineering.

A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements

N. Wu, Yan Qiao, Yanjun Lu, 2021, 2021 IEEE International Conference on Networking, Sensing and Control (ICNSC).

Scheduling and optimization of mixed-processing with multi-variety wafers in dual-armed cluster tools

Kun Zhao, Chunrong Pan, Fei Zhang, 2018, Journal of the Chinese Institute of Engineers.

Petri net-based deadlock avoidance for single-arm cluster tools with concurrently processing two-type wafers

Naiqi Wu, Yufeng Chen, Yan Qiao, 2018, 2018 IEEE 15th International Conference on Networking, Sensing and Control (ICNSC).