Sergey V. Zakharov

High-performance next-generation EUV lithography light source

Peter Choi, Sergey V. Zakharov, Raul Aliaga-Rossel, 2009, Advanced Lithography.

High brightness EUV light sources for actinic metrology

Peter Choi, Keith Powell, Sergey V. Zakharov, 2010, Advanced Lithography.

New Concept of Multi-MA Radiation Loads in Inductive Energy Storage Systems (LL-scheme)

Alexander A. Ivanov, Sergey V. Zakharov, A. s. Chuvatin, 1999 .

High-brightness EUV light source for HVM

Peter Choi, Keith Powell, Sergey V. Zakharov, 2011, Advanced Lithography.

High brightness EUV light source modeling

Peter Choi, Sergey V. Zakharov, Vasily S. Zakharov, 2010, Advanced Lithography.

Plasma dynamics in a hollow cathode triggered discharge with the influence of fast electrons on ionization phenomena and EUV emission

Peter Choi, Sergey V. Zakharov, Vladimir Novikov, 2008 .

Z* Code for DPP and LPP Source Modeling

Peter Choi, Sergey V. Zakharov, P. Choi, 2006 .