Otman Benali

High-performance next-generation EUV lithography light source

Peter Choi, Sergey V. Zakharov, Raul Aliaga-Rossel, 2009, Advanced Lithography.

High brightness EUV light sources for actinic metrology

Peter Choi, Keith Powell, Sergey V. Zakharov, 2010, Advanced Lithography.

High-brightness EUV light source for HVM

Peter Choi, Keith Powell, Sergey V. Zakharov, 2011, Advanced Lithography.

Mesoscale Flow Chemistry: A Plug-Flow Approach to Reaction Optimisation

Simon J. F. Macdonald, Otman Benali, Brian H. Warrington, 2007 .