Vasily S. Zakharov

High-performance next-generation EUV lithography light source

Peter Choi, Sergey V. Zakharov, Raul Aliaga-Rossel, 2009, Advanced Lithography.

High brightness EUV light sources for actinic metrology

Peter Choi, Keith Powell, Sergey V. Zakharov, 2010, Advanced Lithography.

High-brightness EUV light source for HVM

Peter Choi, Keith Powell, Sergey V. Zakharov, 2011, Advanced Lithography.

High brightness EUV light source modeling

Peter Choi, Sergey V. Zakharov, Vasily S. Zakharov, 2010, Advanced Lithography.