Jinhan Song

Selection of rare earth silicates for highly scaled gate dielectrics

Hiroshi Iwai, Nobuyuki Sugii, Kuniyuki Kakushima, 2010 .

Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection

H. Wakabayashi, K. Kakushima, T. Hoshii, 2020, Japanese Journal of Applied Physics.

High field-effect mobility with suppressed negative threshold voltage shift in 4H-SiC MOSFET with cerium oxide interfacial layer

H. Wakabayashi, K. Kakushima, T. Hoshii, 2021 .