M. Kitazoe

Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

A. Masuda, A. Izumi, H. Umemoto, 2002 .

Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4

A. Masuda, H. Umemoto, H. Matsumura, 2001 .

Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy

A. Masuda, H. Umemoto, H. Matsumura, 2000 .

A layer-by-layer Cat-CVD of conformal and stoichiometric silicon nitride with in-situ H2 post-treatment

Kazuya Saito, H. Itoh, M. Hayama, 2006 .

Development of catalytic chemical vapor deposition apparatus for large size substrates

Kazuya Saito, M. Kitazoe, Hideo Tsuboi, 2004 .

Coverage properties of silicon nitride film prepared by the Cat-CVD method

Kazuya Saito, A. Masuda, A. Izumi, 2003 .

Improvement in NBTI by catalytic-CVD silicon nitride for hp-65nm technology

Y. Akasaka, Y. Nara, K. Torii, 2005, Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005..