Duane S. Boning

发表

Spatial variation decomposition via sparse regression

Rob A. Rutenbar, Wangyang Zhang, Karthik Balakrishnan, 2012, 2012 IEEE International Conference on IC Design & Technology.

Redundancy in SAR ADCs

Hae-Seung Lee, Duane S. Boning, Albert H. Chang, 2011, GLSVLSI '11.

A study of within-wafer non-uniformity metrics

Duane S. Boning, Taber H. Smith, Simon J. Fang, 1999, 1999 4th International Workshop on Statistical Metrology (Cat. No.99TH8391).

Online and incremental machine learning approaches for IC yield improvement

Duane S. Boning, Hongge Chen, D. Boning, 2017, 2017 IEEE/ACM International Conference on Computer-Aided Design (ICCAD).

Modeling pattern dependencies in the micron-scale embossing of polymeric layers

Ciprian Iliescu, Duane S. Boning, Hayden Taylor, 2008, Micro + Nano Materials, Devices, and Applications.

Moire fringe method for the measurement of distortions of hot-embossed polymeric substrates

Duane S. Boning, Kamal Youcef-Toumi, Hayden K. Taylor, 2008, International Symposium on Laser Metrology.

The care and feeding of your statistical static timer

Sani R. Nassif, Duane S. Boning, Nagib Hakim, 2004, IEEE/ACM International Conference on Computer Aided Design, 2004. ICCAD-2004..

A methodology for modeling the effects of systematic within-die interconnect and device variation on circuit performance

Sani R. Nassif, Anantha Chandrakasan, Duane S. Boning, 2000, Proceedings 37th Design Automation Conference.

CAFE-the MIT computer aided fabrication environment

Duane S. Boning, Michael B. McIlrath, Donald E. Troxel, 1990, Ninth IEEE/CHMT International Symposium on Electronic Manufacturing Technology,Competitive Manufacturing for the Next Decade.

A general semiconductor press modeling framework

Duane S. Boning, Michael B. McIlrath, Paul Penfield, 1992 .

Semiconductor process design: representations, tools, and methodologies

Duane S. Boning, 1991 .

Statistical modeling with the Virtual Source MOSFET model

Li Yu, Lan Wei, Duane S. Boning, 2013, 2013 Design, Automation & Test in Europe Conference & Exhibition (DATE).

Methodology for analysis of TSV stress induced transistor variation and circuit performance

Li Yu, Duane S. Boning, Douglas Yu, 2012, Thirteenth International Symposium on Quality Electronic Design (ISQED).

Photonic device sensitivity analysis methods: towards process variation-aware silicon photonics design

Duane S. Boning, Sally I. El-Henawy, Z. Zhang, 2019, Optical Engineering + Applications.

A Preliminary Taxonomy for Machine Learning in VLSI CAD

Duane S. Boning, Ibrahim M. Elfadel, Xin Li, 2019 .

A WORKSTATION APPROACH TO

Duane S. Boning, A. Antoniadis, D. Boning, 1988 .

Computer-Integrated Fabrication System Structure

Nicole S. Love, Asbjoern M. Bonvik, Stanley B. Gershwin, 1994 .

A 12b 50MS/s 2.1mW SAR ADC with redundancy and digital background calibration

Duane S. Boning, Albert H. Chang, Hae-Seung Lee, 2013, 2013 Proceedings of the ESSCIRC (ESSCIRC).

Robust Decision Trees Against Adversarial Examples

Cho-Jui Hsieh, Duane S. Boning, Huan Zhang, 2019 .

Using a statistical metrology framework to identify systematic and random sources of die- and wafer-level ILD thickness variation in CMP processes

Duane S. Boning, J. E. Chung, Keh-Jeng Chang, 1995, Proceedings of International Electron Devices Meeting.

Decomposed representation of S-parameters for silicon photonic variation analysis

Duane S. Boning, Sally I. El-Henawy, Ryan Miller, 2020, Optical Engineering + Applications.

Semiconductor wafer representation for TCAD

V. T. Rajan, Duane S. Boning, Martin D. Giles, 1994, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

Statistical metrology: understanding spatial variation in semiconductor manufacturing

Duane S. Boning, J. E. Chung, D. Boning, 1996, Advanced Lithography.

Towards Fast Computation of Certified Robustness for ReLU Networks

Inderjit S. Dhillon, Cho-Jui Hsieh, Duane S. Boning, 2018, ICML.

Reduction of Variation-Induced Energy Overhead in Multi-Core Processors

Devavrat Shah, Anantha Chandrakasan, Duane S. Boning, 2011, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

Variational inference formulation for a model-free simulation of a dynamical system with unknown parameters by a recurrent neural network pdf

Duane S. Boning, Fan-Keng Sun, Jayant R. Kalagnanam, 2020, SIAM J. Sci. Comput..

All-Digital Circuits for Measurement of Spatial Variation in Digital Circuits

Anantha Chandrakasan, Duane S. Boning, Nigel Drego, 2010, IEEE Journal of Solid-State Circuits.

A 12b 250 MS/s Pipelined ADC With Virtual Ground Reference Buffers

Hae-Seung Lee, Duane S. Boning, Hyun H. Boo, 2015, IEEE Journal of Solid-State Circuits.

Use of short-loop electrical measurements for yield improvement

Costas J. Spanos, Duane S. Boning, J. E. Chung, 1995 .

MULTI-LEVEL PATTERN EFFECTS IN COPPER CMP

Duane S. Boning, Tom Brown, Tae Park, 1999 .

Variability analysis of a 28nm near-threshold synchronous voltage converter

Duane S. Boning, Ibrahim M. Elfadel, Ayman Shabra, 2013, 2013 IEEE 20th International Conference on Electronics, Circuits, and Systems (ICECS).

A simple array-based test structure for the AC variability characterization of MOSFETs

Keith A. Jenkins, Karthik Balakrishnan, Duane S. Boning, 2011, 2011 12th International Symposium on Quality Electronic Design.

Adjoint-based particle defect yield modeling for silicon photonics

Duane S. Boning, Z. Zhang, Michael B. McIlrath, 2019, Optical Engineering + Applications.

2008 Best Paper Award

Duane S. Boning, 2010 .

2007 Best Paper Award

Duane S. Boning, 2008 .

Inter- and intra-die polysilicon critical dimension variation

Duane S. Boning, James E. Chung, Brian Stine, 1996, Advanced Lithography.

Variation issues in on-chip optical clock distribution

Duane S. Boning, Anantha P. Chandrakasan, Shiou Lin Sam, 2001, 2001 6th International Workshop on Statistical Methodology (Cat. No.01TH8550).

Efficient Spatial Variation Characterization via Matrix Completion pdf

Zheng Zhang, Duane S. Boning, Hongge Chen, 2017, ArXiv.

Remembrance of transistors past: Compact model parameter extraction using bayesian inference and incomplete new measurements

Li Yu, Duane S. Boning, Ibrahim M. Elfadel, 2014, 2014 51st ACM/EDAC/IEEE Design Automation Conference (DAC).

Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools

Duane S. Boning, Barry M. Wise, B. E. Goodlin, 2003 .

Linking TCAD to EDA - benefits and issues

Andrew R. Neureuther, Robert W. Dutton, Duane S. Boning, 1991, 28th ACM/IEEE Design Automation Conference.

Chapter 2. Computer-Integrated Design and Manufacture of Integrated Circuits

Donald E. Troxel, Duane S. Boning, Dimitri A. Antoniadis, 1995 .

A CLOSED-FORM ANALYTIC MODEL FOR ILD THICKNESS VARIATION IN CMP PROCESSES

Duane S. Boning, J. E. Chung, Iqbal Ali, 1997 .

DOE/Opt: a system for design of experiments, response surface modeling, and optimization using process and device simulation

Duane S. Boning, P. K. Mozumder, D. Boning, 1994 .

2.854 / 2.853 Introduction to Manufacturing Systems, Fall 2010

Stanley B. Gershwin, Duane S. Boning, S. Gershwin, 2010 .

Run by run advanced process control of metal sputter deposition

Duane S. Boning, Taber H. Smith, Jerry A. Stefani, 1998, ICMTS 1998.

A CMP MODEL COMBINING DENSITY AND TIME DEPENDENCIES

Duane S. Boning, Taber H. Smith, Simon J. Fang, 1999 .

Measurement and analysis of contact plug resistance variability

Karthik Balakrishnan, Duane S. Boning, 2009, 2009 IEEE Custom Integrated Circuits Conference.

Three-dimensional profile stitching based on the fiducial markers for microfluidic devices

Duane S. Boning, Kamal Youcef-Toumi, Soon Fatt Yoon, 2009 .

A statistical analysis of single and multiple response surface modeling

Duane S. Boning, Taber H. Smith, B. E. Goodlin, 1999 .

An ultra-compact virtual source FET model for deeply-scaled devices: Parameter extraction and validation for standard cell libraries and digital circuits

Li Yu, Lan Wei, Duane S. Boning, 2013, 2013 18th Asia and South Pacific Design Automation Conference (ASP-DAC).

A Test-Structure to Efficiently Study Threshold-Voltage Variation in Large MOSFET Arrays

Anantha Chandrakasan, Duane S. Boning, Nigel Drego, 2007, 8th International Symposium on Quality Electronic Design (ISQED'07).

An Integrated Technology CAD System for Process and Device Designers

Duane S. Boning, Rajeev Jain, V. Chandramouli, 1993, The Sixth International Conference on VLSI Design.

Run by run control of chemical-mechanical polishing

James Moyne, Duane S. Boning, Roland Telfeyan, 1996 .

MASTIF (MIT Analysis and Simulation Tools for IC Fabrication) - A Workstation Approach to Fabrication Process Design,

Duane S. Boning, Dimitri A. Antoniadis, 1985 .

CAFE-the MIT computer aided fabrication environment

Duane S. Boning, Michael B. McIlrath, Donald E. Troxel, 1990 .

Design for Manufacturability and Statistical Design: A Comprehensive Approach

Sani R. Nassif, Duane S. Boning, Michael Orshansky, 2006 .

Machine Learning Approaches for IC Manufacturing Yield Enhancement

Duane S. Boning, Hongge Chen, 2019 .

An integrated technology CAD system for process and device designers

Duane S. Boning, Purnendu K. Mozumder, K. S. V. Gopalarao, 1993, IEEE Trans. Very Large Scale Integr. Syst..

Semiconductor Process Representation

Donald E. Troxel, Duane S. Boning, Michael B. McIlrath, 1999 .

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

Duane S. Boning, Katia Devriendt, David J. Stein, 2003 .

The Limitations of Adversarial Training and the Blind-Spot Attack pdf

Inderjit S. Dhillon, Cho-Jui Hsieh, Duane S. Boning, 2019, ICLR.

A self-tuning EWMA controller utilizing artificial neural network function approximation techniques

Duane S. Boning, Taber H. Smith, 1996, Nineteenth IEEE/CPMT International Electronics Manufacturing Technology Symposium.

Statistical metrology for characterizing CMP processes

Duane S. Boning, A. Kapoor, J. E. Chung, 1997 .

Statistical library characterization using belief propagation across multiple technology nodes

Li Yu, Duane S. Boning, Ibrahim M. Elfadel, 2015, 2015 Design, Automation & Test in Europe Conference & Exhibition (DATE).

Efficient Spatial Pattern Analysis for Variation Decomposition Via Robust Sparse Regression

Rob A. Rutenbar, Andrzej J. Strojwas, Wangyang Zhang, 2013, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

A multilevel approach to the control of a chemical-mechanical planarization process

James Moyne, Duane S. Boning, John Taylor, 1996 .

Run by run control of chemical-mechanical polishing

Duane S. Boning, Taber H. Smith, William P. Moyne, 1995, Seventeenth IEEE/CPMT International Electronics Manufacturing Technology Symposium. 'Manufacturing Technologies - Present and Future'.

Copper CMP and Process Control

Ping Li, Duane S. Boning, Fritz Redeker, 1999 .

IEEE Transactions on Semiconductor Manufacturing

Robert W. Dutton, Duane S. Boning, W. Chandler Blvd, 2005 .

Practical issues in run by run process control

Duane S. Boning, Taber H. Smith, J. Moyne, 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Bias and variance in single and multiple response surface modeling

Duane S. Boning, J. E. Chung, Taber H. Smith, 1998, IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113).

The intertool profile interchange format: an object-oriented approach [semiconductor technology CAD/CAM]

Michael L. Heytens, Duane S. Boning, Alexander S. Wong, 1991, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

Test structure, circuits and extraction methods to determine the radius of infuence of STI and polysilicon pattern density

Duane S. Boning, Albert H. Chang, Douglas Yu, 2012, Thirteenth International Symposium on Quality Electronic Design (ISQED).

Transistor design with TCAD tuning and device optimization for process/device synthesis

Duane S. Boning, Ih-Chin Chen, A. Chatterjee, 1993, 1993 International Symposium on VLSI Technology, Systems, and Applications Proceedings of Technical Papers.

Chapter 4 Modeling and Simulation

Duane S. Boning, Okumu Ouma, D. Boning, 1999 .

Compensating for CMP Pad Wear Using Run by Run Feedback Control

James Moyne, Duane S. Boning, Arnon M. Hurwitz, 1996 .

The care and feeding of your statistical static timer

Duane S. Boning, N. Hakim, S. R. Nassif, 2004, ICCAD 2004.

Evaluation of pad life in chemical mechanical polishing process using statistical metrology

Duane S. Boning, J. E. Chung, Sharad Prasad, 1997, Advanced Lithography.

Simultaneous Fault Detection and Identification for Plasma Etching Processes

Duane S. Boning, Barry M. Wise, B. E. Goodlin, 2002 .

An in-situ sensor for reduced consumable usage through control of CMP

Duane S. Boning, Taber H. Smith, Angie Nishimoto, 1998 .

Architecture for distributed design and fabrication

Donald E. Troxel, Duane S. Boning, Michael B. McIlrath, 1997, Other Conferences.

Towards nanoimprint lithography-aware layout design checking

Duane S. Boning, Hayden Taylor, 2010, Advanced Lithography.

A system for semiconductor process specification

Duane S. Boning, Jue-Hsien Chern, D. Durbeck, 1993 .

Compact Model Parameter Extraction Using Bayesian Inference, Incomplete New Measurements, and Optimal Bias Selection

Li Yu, Duane S. Boning, Ibrahim M. Elfadel, 2016, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

Multidisciplinary approaches target ES&H

Duane S. Boning, Anthony J. Muscat, Karen K. Gleason, 1999 .

Design for Manufacturability and Statistical Design - A Constructive Approach

Sani R. Nassif, Duane S. Boning, Michael Orshansky, 2007, Series on integrated circuits and systems.

A self-tuning EWMA controller utilizing artificial neural network function approximation techniques

Duane S. Boning, Taber H. Smith, T. Smith, 1996, Nineteenth IEEE/CPMT International Electronics Manufacturing Technology Symposium.

Multi-Stage Influence Function pdf

Cho-Jui Hsieh, Duane S. Boning, Yang Li, 2020, NeurIPS.

Efficient performance estimation with very small sample size via physical subspace projection and maximum a posteriori estimation

Li Yu, Duane S. Boning, Ibrahim M. Elfadel, 2014, 2014 Design, Automation & Test in Europe Conference & Exhibition (DATE).

A Matrix Math Library for Java

Duane S. Boning, Taber H. Smith, Aaron E. Gower, 1997, Concurrency Practice and Experience.

Integrating semiconductor process design and manufacture using a unified process flow representation

Duane S. Boning, Michael B. McIlrath, 1990, [1990] Proceedings. Rensselaer's Second International Conference on Computer Integrated Manufacturing.

GIRAPHE V3.3: A User's Manual with Examples

Duane S. Boning, Robert M. Harris, 1988 .

Interval-valued statistical modeling of oxide chemical-mechanical polishing

Rob A. Rutenbar, Duane S. Boning, James D. Ma, 2005, ICCAD-2005. IEEE/ACM International Conference on Computer-Aided Design, 2005..

Statistical Metrology: Tools for Understanding Variation

Duane S. Boning, J. E. Chung, D. Boning, 1996 .

Effects of a random process variation on the transfer characteristics of a fundamental photonic integrated circuit component

Duane S. Boning, Sally I. El-Henawy, Ryan Miller, 2018, Optical Engineering + Applications.

Test Structures for Circuit Yield Assessment and Modeling

Duane S. Boning, 2003, ISQED.

On 𝓁p-norm Robustness of Ensemble Stumps and Trees pdf

Yihan Wang, Duane S. Boning, Huan Zhang, 2020, ArXiv.

Flexible distributed architecture for semiconductor process control and experimentation

Duane S. Boning, Michael B. McIlrath, Aaron E. Gower, 1997, Other Conferences.

Computer-Assisted Prototyping of Advanced Microsystems

Anantha P. Chandrakasan, Debashis Saha, Duane S. Boning, 1997 .

SPATIAL VARIATION IN SEMICONDUCTOR PROCESSES: MODELING FOR CONTROL

Duane S. Boning, J. E. Chung, Rajesh Divecha, 1998 .

Materials Research Society Symposium Proceedings: Preface

Duane S. Boning, Johann W. Bartha, Ara Philipossian, 2004 .

Analysis and decomposition of spatial variation in integrated circuit processes and devices

Duane S. Boning, J. E. Chung, B. E. Stine, 1997 .

Adjoint-Based Sensitivity Analysis for Silicon Photonic Variations

Jacob K. White, Duane S. Boning, Luca Daniel, 2019, 2019 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO).

Toward efficient spatial variation decomposition via sparse regression

Rob A. Rutenbar, Wangyang Zhang, Karthik Balakrishnan, 2011, 2011 IEEE/ACM International Conference on Computer-Aided Design (ICCAD).

15.6 12b 250MS/S pipelined ADC with virtual ground reference buffers

Hae-Seung Lee, Duane S. Boning, Hyun H. Boo, 2015, 2015 IEEE International Solid-State Circuits Conference - (ISSCC) Digest of Technical Papers.

A Matrix Math Library for Java

Duane S. Boning, Taber H. Smith, Aaron E. Gower, 1997, Concurr. Pract. Exp..

Test structures for delay variability

Sani R. Nassif, Duane S. Boning, Frank Liu, 2002, TAU '02.

Statistical metrology for interlevel dielectric thickness variation

Duane S. Boning, J. E. Chung, Keh-Jeng Chang, 1994, Advanced Lithography.

Overview of Methods for Characterization of Pattern Dependencies in Copper CMP

Duane S. Boning, Tamba Tugbawa, Tae Park, 2000 .

2006 Best Paper Award

Duane S. Boning, 2007 .

Models of process variations in device and interconnect

Sani R. Nassif, Duane S. Boning, S. Nassif, 2000 .

Performance Variability of a 90GHz Static CML Frequency Divider in 65nm SOI CMOS

Jean-Olivier Plouchart, Duane S. Boning, Choongyeun Cho, 2007, 2007 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

Assessing and characterizing inter-and intra-die variation using a statistical metrology framework: A CMP case study

Duane S. Boning, Sharad Prasad, O. S. Nakagawa, 1999 .

Variation-Aware Methods and Models for Silicon Photonic Design-for-Manufacturability

Duane S. Boning, Sally I. El-Henawy, Zhengxing Zhang, 2021, Journal of Lightwave Technology.

Variational inference formulation for a model-free simulation of a dynamical system with unknown parameters by a recurrent neural network

Duane S. Boning, Fan-Keng Sun, Kyongmin Yeo, 2020, SIAM J. Sci. Comput..

Process Variation-Aware Photonic Design

Duane S. Boning, Sally I. El-Henawy, Zhengxing Zhang, 2021, 2021 Optical Fiber Communications Conference and Exhibition (OFC).

Adjusting for Autocorrelated Errors in Neural Networks for Time Series Regression and Forecasting pdf

Duane S. Boning, Fan-Keng Sun, Christopher I. Lang, 2021, ArXiv.

Characterization and Modeling of Dynamic Thermal Behavior in CMP

Duane S. Boning, David White, Jason Melvin, 2003 .

Modeling of Reverse Tone Etchback Shallow Trench Isolation Chemical Mechanical Polishing

Duane S. Boning, Terence Gan, Brian Lee, 2001 .

Simulating the impact of poly-CD wafer-level and die-level variation on circuit performance

Duane S. Boning, D. J. Ciplickas, B. E. Stine, 1997, 1997 2nd International Workshop on Statistical Metrology.

An investigation of the detrimental impact of trapped air in thermoplastic micro-embossing

Duane S. Boning, Hayden Taylor, Yee Cheong Lam, 2010 .

EFFECT OF FINE-LINE DENSITY AND PITCH ON INTERCONNECT ILD THICKNESS VARIATION IN OXIDE CMP PROCESSES

Duane S. Boning, Soo-Young Oh, B. E. Stine, 1997 .

A computationally simple method for simulating the micro-embossing of thermoplastic layers

Duane S. Boning, Hayden Taylor, Yee Cheong Lam, 2009 .

Multi-Strata Stealth Dicing Before Grinding for Singulation-Defects Elimination and Die Strength Enhancement: Experiment and Simulation

Roy E. Welsch, Duane S. Boning, Weng Hong Teh, 2015, IEEE Transactions on Semiconductor Manufacturing.

Nanotopography effects on chemical mechanical polishing for shallow trench isolation

Duane S. Boning, Noel Poduje, Brian Lee, 2000, 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072).

A Novel Statistical Metrology Framework for Identifying Sources of Variation in Oxide Chemical‐Mechanical Polishing

Duane S. Boning, Hitoshi Aoki, Soo-Young Oh, 1998 .

USING SMART DUMMY FILL AND SELECTIVE REVERSE ETCHBACK FOR PATTERN DENSITY EQUALIZATION

Duane S. Boning, Brian Lee, David J. Stein, 2000 .

Artificial neural network exponentially weighted moving average controller for semiconductor processes

Duane S. Boning, Taber H. Smith, 1997 .

STATISTICAL METHODS FOR SEMICONDUCTOR MANUFACTURING

Duane S. Boning, Jerry A. Stefani, S. W. Butler, 1999 .

Multivariate Statistical Process Control and Signature Analysis Using Eigenfactor Detection Methods

Roy E. Welsch, Duane S. Boning, Kuang-Han Chen, 1999 .

A razor-blade test of the demolding energy in a thermoplastic embossing process

Ciprian Iliescu, Duane S. Boning, Hayden Taylor, 2011 .